Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets (Q4671391): Difference between revisions
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Property / cites work: Adaptive production scheduling of virtual production systems using object-oriented Petri nets with changeable structure / rank | |||
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Property / cites work: Modelling and analysis of wafer fabrication scheduling via generalized stochastic Petri net and simulated annealing / rank | |||
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Latest revision as of 09:32, 10 June 2024
scientific article; zbMATH DE number 2161467
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English | Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets |
scientific article; zbMATH DE number 2161467 |
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Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets (English)
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26 April 2005
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