Constructing the OGE for promoting tool group productivity in semiconductor manufacturing (Q5438628): Difference between revisions

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Latest revision as of 15:54, 27 June 2024

scientific article; zbMATH DE number 5229820
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English
Constructing the OGE for promoting tool group productivity in semiconductor manufacturing
scientific article; zbMATH DE number 5229820

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    Constructing the OGE for promoting tool group productivity in semiconductor manufacturing (English)
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    24 January 2008
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    overall equipment efficiency
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    tool productivity
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    tool group
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    semiconductor manufacturing
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