Scheduling of multiple in-line steppers for semiconductor wafer fabs (Q5172568): Difference between revisions
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scientific article; zbMATH DE number 6397221
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English | Scheduling of multiple in-line steppers for semiconductor wafer fabs |
scientific article; zbMATH DE number 6397221 |
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Scheduling of multiple in-line steppers for semiconductor wafer fabs (English)
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4 February 2015
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scheduling
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semiconductor
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flow shop
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port capacity constraints
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genetic algorithm
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meta-heuristic algorithms
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