Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (Q259298): Difference between revisions
From MaRDI portal
Created a new Item |
Changed an Item |
||
| Property / Mathematics Subject Classification ID | |||
| Property / Mathematics Subject Classification ID: 78A45 / rank | |||
Normal rank | |||
| Property / Mathematics Subject Classification ID | |||
| Property / Mathematics Subject Classification ID: 78M12 / rank | |||
Normal rank | |||
| Property / zbMATH DE Number | |||
| Property / zbMATH DE Number: 6554217 / rank | |||
Normal rank | |||
| Property / zbMATH Keywords | |||
wave scattering | |||
| Property / zbMATH Keywords: wave scattering / rank | |||
Normal rank | |||
| Property / zbMATH Keywords | |||
diffraction | |||
| Property / zbMATH Keywords: diffraction / rank | |||
Normal rank | |||
| Property / zbMATH Keywords | |||
integral equations | |||
| Property / zbMATH Keywords: integral equations / rank | |||
Normal rank | |||
| Property / zbMATH Keywords | |||
mathematical modeling | |||
| Property / zbMATH Keywords: mathematical modeling / rank | |||
Normal rank | |||
| Property / zbMATH Keywords | |||
nanostructures | |||
| Property / zbMATH Keywords: nanostructures / rank | |||
Normal rank | |||
Revision as of 13:02, 27 June 2023
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method |
scientific article |
Statements
Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (English)
0 references
11 March 2016
0 references
wave scattering
0 references
diffraction
0 references
integral equations
0 references
mathematical modeling
0 references
nanostructures
0 references
