Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems (Q335195): Difference between revisions

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Property / Mathematics Subject Classification ID: 74F15 / rank
 
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Property / Mathematics Subject Classification ID: 74S05 / rank
 
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MEMS
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micro-systems
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spontaneous adhesion
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stiction
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capillary forces
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Van der Waals forces
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rough surfaces
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FE simulations
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Revision as of 05:59, 28 June 2023

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Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems
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    Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems (English)
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    2 November 2016
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    MEMS
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    micro-systems
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    spontaneous adhesion
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    stiction
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    capillary forces
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    Van der Waals forces
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    rough surfaces
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    FE simulations
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