Size effect on the static behavior of electrostatically actuated microbeams (Q362909): Difference between revisions
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| Property / Mathematics Subject Classification ID: 74F15 / rank | |||
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| Property / Mathematics Subject Classification ID: 74K10 / rank | |||
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| Property / zbMATH DE Number: 6203199 / rank | |||
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electrostatically actuated microbeam | |||
| Property / zbMATH Keywords: electrostatically actuated microbeam / rank | |||
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size effect | |||
| Property / zbMATH Keywords: size effect / rank | |||
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deflection | |||
| Property / zbMATH Keywords: deflection / rank | |||
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pull-in voltage | |||
| Property / zbMATH Keywords: pull-in voltage / rank | |||
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MEMS | |||
| Property / zbMATH Keywords: MEMS / rank | |||
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Revision as of 12:01, 28 June 2023
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Size effect on the static behavior of electrostatically actuated microbeams |
scientific article |
Statements
Size effect on the static behavior of electrostatically actuated microbeams (English)
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30 August 2013
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electrostatically actuated microbeam
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size effect
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deflection
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pull-in voltage
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MEMS
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