The quenching set of a MEMS capacitor in two-dimensional geometries (Q379914): Difference between revisions

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Property / author: Francisco-Javier Sayas / rank
 
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micro-electro-mechanical systems
Property / zbMATH Keywords: micro-electro-mechanical systems / rank
 
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bi-Laplace equations
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nanotechnology
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quenching set
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Revision as of 11:29, 29 June 2023

scientific article
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English
The quenching set of a MEMS capacitor in two-dimensional geometries
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    The quenching set of a MEMS capacitor in two-dimensional geometries (English)
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    11 November 2013
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    micro-electro-mechanical systems
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    bi-Laplace equations
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    nanotechnology
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    quenching set
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