Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS (Q400172): Difference between revisions
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| Property / Mathematics Subject Classification ID: 74-05 / rank | |||
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| Property / Mathematics Subject Classification ID: 74M25 / rank | |||
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| Property / Mathematics Subject Classification ID: 74S05 / rank | |||
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| Property / zbMATH DE Number: 6333113 / rank | |||
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adhesion | |||
| Property / zbMATH Keywords: adhesion / rank | |||
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stiction | |||
| Property / zbMATH Keywords: stiction / rank | |||
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experiments | |||
| Property / zbMATH Keywords: experiments / rank | |||
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finite element method | |||
| Property / zbMATH Keywords: finite element method / rank | |||
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Revision as of 17:11, 29 June 2023
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS |
scientific article |
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Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS (English)
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21 August 2014
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adhesion
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stiction
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experiments
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finite element method
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