Impact dynamics of MEMS switches (Q979394)

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Impact dynamics of MEMS switches
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    Statements

    title
    Impact dynamics of MEMS switches (English)
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    author
    Ronald P. Larose
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    Kevin D. Murphy
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    publication date
    28 June 2010
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    zbMATH Keywords
    MEMS switches
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    impact dynamics
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    squeeze film damping
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    Identifiers

    Mathematics Subject Classification ID
    74M05
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    74M20
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    74F10
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    76A20
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    zbMATH DE Number
    5727060
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