Efficient generation of cycle time-throughput curves through simulation and metamodeling (Q3442875)

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Efficient generation of cycle time-throughput curves through simulation and metamodeling
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    Efficient generation of cycle time-throughput curves through simulation and metamodeling (English)
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    23 May 2007
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    response surface modeling
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    design of experiments
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    semiconductor manufacturing
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    discrete event simulation
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    queueing
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