The quenching set of a MEMS capacitor in two-dimensional geometries (Q379914)

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The quenching set of a MEMS capacitor in two-dimensional geometries
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    The quenching set of a MEMS capacitor in two-dimensional geometries (English)
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    11 November 2013
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    micro-electro-mechanical systems
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    bi-Laplace equations
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    nanotechnology
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    quenching set
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