A convex optimization-based nonlinear filtering algorithm with applications to real-time sensing for patterned wafers (Q5266933)
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scientific article; zbMATH DE number 6732674
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English | A convex optimization-based nonlinear filtering algorithm with applications to real-time sensing for patterned wafers |
scientific article; zbMATH DE number 6732674 |
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A convex optimization-based nonlinear filtering algorithm with applications to real-time sensing for patterned wafers (English)
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20 June 2017
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