Thermal effects on liquid film flow during spin coating (Q3555658)

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Thermal effects on liquid film flow during spin coating
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    title
    Thermal effects on liquid film flow during spin coating (English)
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    DOI
    10.1063/1.1398280
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    author
    Akihiro Kitamura
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    publication date
    22 April 2010
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    zbMATH DE Number
    5698346
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    zbMATH Keywords
    liquid films
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    film flow
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    viscosity
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    spin coating
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    interface phenomena
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    OpenAlex ID
    W2060579952
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