Impact dynamics of MEMS switches

DOI10.1007/s11071-009-9598-5zbMath1189.74087OpenAlexW1969060050MaRDI QIDQ979394

Ronald P. Larose, Kevin D. Murphy

Publication date: 28 June 2010

Published in: Nonlinear Dynamics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11071-009-9598-5

zbMATH Keywords

impact dynamicsMEMS switchessqueeze film damping

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05) Fluid-solid interactions (including aero- and hydro-elasticity, porosity, etc.) (74F10) Thin fluid films (76A20) Impact in solid mechanics (74M20)

Related Items (3)

Viscoelasticity effects on resonant response of a shear deformable extensible microbeam ⋮ Vibration characteristics of sandwich microshells with porous functionally graded face sheets ⋮ Supercritical nonlinear parametric dynamics of Timoshenko microbeams

Cites Work

• Nonlinear dynamics of an electrically driven impact microactuator

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