Solving the mathematical model of the electrode sheath in symmetrically driven rf discharges

DOI10.1006/jcph.1994.1068zbMath0796.76096OpenAlexW1998349158MaRDI QIDQ1326690

Natalia Sternberg, Valery A. Godyak

Publication date: 4 October 1994

Published in: Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1006/jcph.1994.1068

zbMATH Keywords

asymmetrical behaviorion and electron plasma frequenciesplasma-sheath interfacerf sheath

Mathematics Subject Classification ID

Ionized gas flow in electromagnetic fields; plasmic flow (76X05)

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