Geometric advection and its application in the emulation of high aspect ratio structures

DOI10.1016/j.cma.2021.114196OpenAlexW3204978669MaRDI QIDQ2246344

Xaver Klemenschits, Lado Filipovic, Siegfried Selberherr

Publication date: 16 November 2021

Published in: Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.cma.2021.114196

zbMATH Keywords

level setdeep reactive ion etchingdesign-technology-co-optimizationgeometric advectionprocess emulation

Mathematics Subject Classification ID

Computer-aided design (modeling of curves and surfaces) (65D17)

Uses Software

• GitHub

Cites Work

• Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations
• Back and forth error compensation and correction methods for removing errors induced by uneven gradients of the level set function
• The distortion of the level set gradient under advection
• Shock capturing, level sets, and PDE based methods in computer vision and image processing: A review of Osher's contributions
• Computing minimal surfaces via level set curvature flow
• One-Sided Difference Approximations for Nonlinear Conservation Laws
• High-Order Essentially Nonoscillatory Schemes for Hamilton–Jacobi Equations

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