Effect of geometry on the performance of MEMS aluminum nitride trampoline resonators in longitudinal resonance (Q2450305)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Effect of geometry on the performance of MEMS aluminum nitride trampoline resonators in longitudinal resonance |
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Effect of geometry on the performance of MEMS aluminum nitride trampoline resonators in longitudinal resonance (English)
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20 May 2014
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