Control Charts for Particles in the Semiconductor Manufacturing Process (Q2915298)

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Control Charts for Particles in the Semiconductor Manufacturing Process
scientific article

    Statements

    title
    Control Charts for Particles in the Semiconductor Manufacturing Process (English)
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    author
    Hironobu Kawamura
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    Ken Nishina
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    Masanobu Higashide
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    publication date
    16 September 2012
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    Identifiers

    DOI
    10.1515/EQC.2008.95
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    Mathematics Subject Classification ID
    90B90
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    90B25
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    62P30
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    zbMATH DE Number
    6083073
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