A methodology for fast finite element modeling of electrostatically actuated MEMS
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Publication:3623185
DOI10.1002/nme.2469zbMath1160.74388MaRDI QIDQ3623185
Prasad Sumant, Andreas C. Cangellaris, N. R. Aluru
Publication date: 16 April 2009
Published in: International Journal for Numerical Methods in Engineering (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1002/nme.2469
74M05: Control, switches and devices (``smart materials) in solid mechanics
74S05: Finite element methods applied to problems in solid mechanics
74F15: Electromagnetic effects in solid mechanics
78A55: Technical applications of optics and electromagnetic theory
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