scientific article; zbMATH DE number 1024672
Publication:4342503
zbMath0879.70001MaRDI QIDQ4342503
Sergej Fatikow, Ulrich Rembold
Publication date: 22 June 1997
Title: zbMATH Open Web Interface contents unavailable due to conflicting licenses.
temperature sensorsradiation therapylithographyelectro-rheological fluidsmoldingshape memory materialsacceleration micro-sensorselectrostatic micropositionerelectrostatic micropumpgalvano-formingimplantable fiberLIGA techniquemicroactuator pilemicroinstrumentsoptical dosimeterspiezoelectric microatuatorssensor-actuator technology
Control/observation systems involving computers (process control, etc.) (93C83) Control of mechanical systems (70Q05) Kinematics of mechanisms and robots (70B15) Introductory exposition (textbooks, tutorial papers, etc.) pertaining to mechanics of particles and systems (70-01)
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