A cellular automaton methodology for the simulation of integrated circuit fabrication processes

DOI10.1016/S0167-739X(01)00061-9zbMath1042.68081OpenAlexW2017817656WikidataQ58841218 ScholiaQ58841218MaRDI QIDQ4788304

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Publication date: 21 January 2003

Published in: Future Generation Computer Systems (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/s0167-739x(01)00061-9

zbMATH Keywords

ModellingCellular automataSimulation

Mathematics Subject Classification ID

Cellular automata (computational aspects) (68Q80)

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