A cellular automaton methodology for the simulation of integrated circuit fabrication processes (Q4788304)
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scientific article; zbMATH DE number 1856271
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A cellular automaton methodology for the simulation of integrated circuit fabrication processes |
scientific article; zbMATH DE number 1856271 |
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A cellular automaton methodology for the simulation of integrated circuit fabrication processes (English)
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21 January 2003
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Cellular automata
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Simulation
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Modelling
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