Asymptotic analysis of the formation of thin liquid film in spin coating

DOI10.1016/S0169-5983(01)00041-7zbMath1064.76507MaRDI QIDQ4793974

Masatsugu Yoshizawa, Akihiro Kitamura, Eiji Hasegawa

Publication date: 16 February 2003

Published in: Fluid Dynamics Research (Search for Journal in Brave)

zbMATH Keywords

surface tensioninertial forcefilm planarization

Mathematics Subject Classification ID

Thin fluid films (76A20) Asymptotic methods, singular perturbations applied to problems in fluid mechanics (76M45) General theory of rotating fluids (76U05) Capillarity (surface tension) for incompressible viscous fluids (76D45)

Related Items (6)

Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques ⋮ Long-wave perturbation analysis to the stability of a thin viscoplastic material flowing on a rotating circular disk ⋮ Extended asymptotic solutions to the spin-coating model with small evaporation ⋮ Finite amplitude long-wave instability of a thin viscoelastic fluid during spin coating ⋮ Weakly nonlinear stability analysis of a thin magnetic fluid during spin coating ⋮ Weakly nonlinear hydrodynamic stability of the thin Newtonian fluid flowing on a rotating circular disk

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