Chaotic motion in a micro-electro-mechanical system with nonlinearity from capacitors (Q1612051)

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Chaotic motion in a micro-electro-mechanical system with nonlinearity from capacitors
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    Chaotic motion in a micro-electro-mechanical system with nonlinearity from capacitors (English)
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    28 August 2002
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    MEMS
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    Chaotic motion
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    Frequency band
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    Resonator
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