Mechanics of Smart-Cut technology (Q1781473)

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Mechanics of Smart-Cut technology
scientific article

    Statements

    title
    Mechanics of Smart-Cut technology (English)
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    author
    Xi Qiao Feng
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    Q442018
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    publication date
    27 June 2005
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    zbMATH Keywords
    Crack
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    Debonding
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    Fracture
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    Stress intensity factor
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    Micro-mechanics
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    Analytic solution
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    Chemo-mechanical process
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    Semiconductor material
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    Identifiers

    Mathematics Subject Classification ID
    74M25
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    74E40
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    74G70
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    zbMATH DE Number
    2183130
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