Geometric advection and its application in the emulation of high aspect ratio structures (Q2246344)

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Geometric advection and its application in the emulation of high aspect ratio structures
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    Geometric advection and its application in the emulation of high aspect ratio structures (English)
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    16 November 2021
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    level set
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    process emulation
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    geometric advection
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    deep reactive ion etching
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    design-technology-co-optimization
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