A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators (Q2247314)

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A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators
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    A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators (English)
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    17 November 2021
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    frequency-domain boundary element method
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    finite element method
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    micro-electro-mechanical system resonator
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    anchor losses
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    wave dissipation
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    \(\mathcal{H}\)-matrix
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