Kinetic analysis of surface roughness in a microchannel (Q2446512)

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Kinetic analysis of surface roughness in a microchannel
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    Kinetic analysis of surface roughness in a microchannel (English)
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    17 April 2014
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    kinetic model equation
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    MEMS
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    roughness effect
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    compressibility effect
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    rarefied gas
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