Supervisory control of a rapid thermal multiprocessor (Q3140095)

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Supervisory control of a rapid thermal multiprocessor
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    title
    Supervisory control of a rapid thermal multiprocessor (English)
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    DOI
    10.1109/9.231459
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    author
    Silvano Balemi
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    Gérard J. Hoffmann
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    P. Gyugyi
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    Howard Wong-Toi
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    Gene F. Franklin
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    publication date
    20 December 1993
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    zbMATH DE Number
    436814
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    OpenAlex ID
    W1995862561
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