Solving the mathematical model of the electrode sheath in symmetrically driven rf discharges (Q1326690)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Solving the mathematical model of the electrode sheath in symmetrically driven rf discharges |
scientific article |
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Solving the mathematical model of the electrode sheath in symmetrically driven rf discharges (English)
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4 October 1994
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ion and electron plasma frequencies
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rf sheath
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asymmetrical behavior
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plasma-sheath interface
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