OSCILLATORY BEHAVIOR OF AN ELECTROSTATICALLY ACTUATED MICROCANTILEVER GYROSCOPE (Q2972234)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | OSCILLATORY BEHAVIOR OF AN ELECTROSTATICALLY ACTUATED MICROCANTILEVER GYROSCOPE |
scientific article |
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OSCILLATORY BEHAVIOR OF AN ELECTROSTATICALLY ACTUATED MICROCANTILEVER GYROSCOPE (English)
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7 April 2017
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oscillatory behavior
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natural frequencies
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base rotation
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pre-deformed microgyroscope
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fringing field
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proof mass
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