A framework for determining MIMO process parameters by a neuro-DM&ACO approach (Q5438679)

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scientific article; zbMATH DE number 5229861
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A framework for determining MIMO process parameters by a neuro-DM&ACO approach
scientific article; zbMATH DE number 5229861

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    A framework for determining MIMO process parameters by a neuro-DM&ACO approach (English)
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    24 January 2008
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    artificial neural network (ANN)
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    ant colony optimisation (ACO)
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    data mining
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    chemical-mechanical planarisation (CMP)
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