Measurement and tracking control of the Z‐tilts error compensating stage of the nano‐measuring machine (Q3018726)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Measurement and tracking control of the Z‐tilts error compensating stage of the nano‐measuring machine |
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Measurement and tracking control of the Z‐tilts error compensating stage of the nano‐measuring machine (English)
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27 July 2011
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actuators
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control systems
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cybernetics
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piezoelectricity
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tracking
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