Noise-induced chaos in the electrostatically actuated MEMS resonators (Q715441)

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Noise-induced chaos in the electrostatically actuated MEMS resonators
scientific article

    Statements

    title
    Noise-induced chaos in the electrostatically actuated MEMS resonators (English)
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    author
    Wen-Ming Zhang
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    Osamu Tabata
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    Toshiyuki Tsuchiya
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    Guang Meng
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    publication date
    29 October 2012
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    zbMATH Keywords
    MEMS
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    resonator
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    electrostatic actuation
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    bounded noise
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    chaos
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    Identifiers

    Mathematics Subject Classification ID
    78A55
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    37L05
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    78A30
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    34C28
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    zbMATH DE Number
    6099850
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    OpenAlex ID
    W2063928716
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