Inverse-feedforward and robust-feedback control for high-speed operation on piezo-stages (Q2871701)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Inverse-feedforward and robust-feedback control for high-speed operation on piezo-stages |
scientific article |
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Inverse-feedforward and robust-feedback control for high-speed operation on piezo-stages (English)
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9 January 2014
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piezo-stage
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feedforward control
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robust control
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hysteresis compensation
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