Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook (Q2341393)
From MaRDI portal
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook |
scientific article |
Statements
Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook (English)
0 references
24 April 2015
0 references
scheduling
0 references
dispatching
0 references
advanced process control (APC)
0 references
semiconductor manufacturing
0 references
0 references
0 references
