Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems (Q335195)
From MaRDI portal
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems |
scientific article |
Statements
Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems (English)
0 references
2 November 2016
0 references
MEMS
0 references
micro-systems
0 references
spontaneous adhesion
0 references
stiction
0 references
capillary forces
0 references
Van der Waals forces
0 references
rough surfaces
0 references
FE simulations
0 references
0 references
0 references
0 references
