Electrostatic fringes effect in systems with three charged parallel micro-beams (Q346071)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Electrostatic fringes effect in systems with three charged parallel micro-beams |
scientific article |
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Electrostatic fringes effect in systems with three charged parallel micro-beams (English)
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5 December 2016
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fringes
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edge effect
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micro-beam
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electrostatic force
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microelectromechanical systems
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MEMS
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