A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates (Q850043)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates |
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates |
scientific article |
Statements
A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates (English)
0 references
15 November 2006
0 references
thin films
0 references
plasticity
0 references
small-scale yielding
0 references
strain hardening
0 references
MEMS
0 references
