Thermoelastic damping effect analysis in micro flexural resonator of atomic force microscopy (Q1630710)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Thermoelastic damping effect analysis in micro flexural resonator of atomic force microscopy |
scientific article |
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Thermoelastic damping effect analysis in micro flexural resonator of atomic force microscopy (English)
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10 December 2018
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thermoelastic damping (TED)
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atomic force microscopy (AFM)
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quality factor
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