Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage (Q2480951)

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Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage
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    Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage (English)
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    7 April 2008
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    input coupling
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    micro-positioning stage
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    finite element method
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    optimal design
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