Electrostatic BEM for MEMS with thin conducting plates and shells (Q2507217)

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Electrostatic BEM for MEMS with thin conducting plates and shells
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    Electrostatic BEM for MEMS with thin conducting plates and shells (English)
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    10 October 2006
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    boundary integral equations
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    boundary element method
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    singular integrals
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    nearly singular integrals
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    micro-electro-mechanical systems
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    thin plates
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    thin shells
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