A methodology for fast finite element modeling of electrostatically actuated MEMS (Q3623185)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A methodology for fast finite element modeling of electrostatically actuated MEMS |
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A methodology for fast finite element modeling of electrostatically actuated MEMS (English)
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16 April 2009
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MEMS
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modeling
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FEM
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electrostatic actuation
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