Singularly perturbed BVP to estimation of diaphragm deflection in MEMS capacitive microphone: an application of ADM (Q671167)

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Singularly perturbed BVP to estimation of diaphragm deflection in MEMS capacitive microphone: an application of ADM
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    Singularly perturbed BVP to estimation of diaphragm deflection in MEMS capacitive microphone: an application of ADM (English)
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    20 March 2019
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    Adomian decomposition method
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    analytical solution
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    diaphragm deflection
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    singular perturbation
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    semi-group theory
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    capacitive microphone
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