Control charts for particles in the semiconductor manufacturing process

DOI10.1515/EQC.2008.95MaRDI QIDQ2915298zbMATH OpenOpenAlexFDO

Authors Hironobu Kawamura, Ken Nishina, Masanobu Higashide

Publication date 16 September 2012

Published in Economic Quality Control (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1515/eqc.2008.95

Mathematics Subject Classification ID

Applications of statistics in engineering and industry; control charts (62P30) Reliability, availability, maintenance, inspection in operations research (90B25) Case-oriented studies in operations research (90B90)

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Cites work

• Performance of Some Resistant Rules for Outlier Labeling

Cited in

(1)

• Data transformation in SPC for semiconductor machinery control: A case of monitoring particles

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