Micromechanical high-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics

DOI10.5281/zenodo.7441332ZenodoMaRDI QIDQ6710757FDO

Authors André Strittmatter, Jürgen Bläsing, Anastasiia Ciers, Witlef Wieczorek, Sushanth Kini Manjeshwar, Fia Hellman

Publication date 15 December 2022

Copyright license Creative Commons Attribution 4.0 International

Description

We share experimental data for Figs. 2,4,5,6,11,12,13 ofarxiv manuscriptarXiv:2211.12469 [physics.app-ph] entitled Micromechanical high-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics.

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