Thickness dependence of the mechanical properties of piezoelectric high-Q_m nanomechanical resonators made from aluminium nitride
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Thickness dependence of the mechanical properties of piezoelectric high-Q m nanomechanical resonators made from aluminium nitride
Thickness dependence of the mechanical properties of piezoelectric high-Q m nanomechanical resonators made from aluminium nitride
Data used for figures in "Thickness dependence of the mechanical properties of piezoelectric high-Q_m nanomechanical resonators made from aluminium nitride" Anastasiia Ciers et.al Materials for Quantum Technology4, 046301 (2024);arXiv:2410.03944[cond-mat.mes-hall] (2024)
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