Adaptive sliding mode control of a high-precision ball-screw-driven stage (Q1015061)

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Adaptive sliding mode control of a high-precision ball-screw-driven stage
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    Adaptive sliding mode control of a high-precision ball-screw-driven stage (English)
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    7 May 2009
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    high-precision control
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    nano-stage
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    adaptive sliding mode control
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    friction dynamics
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