Measurement of the thermal transport properties of dielectric thin films using the micro-Raman method (Q1045558)
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scientific article; zbMATH DE number 5648389
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| English | Measurement of the thermal transport properties of dielectric thin films using the micro-Raman method |
scientific article; zbMATH DE number 5648389 |
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Measurement of the thermal transport properties of dielectric thin films using the micro-Raman method (English)
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15 December 2009
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thermal conductivity
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dielectric thin films
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submicrometer- or nanometer-scale
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porous silicon
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thermal effect micro-systems (TEMS)
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0.6884089708328247
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0.6876533031463623
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0.673190176486969
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0.6681905388832092
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