A mathematical model for wet-chemical diffusion-controlled mask etching through a circular hole (Q1404099)
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scientific article; zbMATH DE number 1968148
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| English | A mathematical model for wet-chemical diffusion-controlled mask etching through a circular hole |
scientific article; zbMATH DE number 1968148 |
Statements
A mathematical model for wet-chemical diffusion-controlled mask etching through a circular hole (English)
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20 August 2003
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asymptotic solutions
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diffusion-controlled wet-chemical etching
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mask opening
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oblate spheroidal coordinates
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0.7847086787223816
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0.7758507132530212
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0.7485910654067993
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0.7472580671310425
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0.7011967301368713
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